| Technology | MEMS | Semiconductor | Mechanical | ||
|---|---|---|---|---|---|
| Metric |  | Cantilever MEMS | PhotoMOS | CMOS/BCD ASIC | Reed Relay |
| Ron | 3 Ω | 3 Ω | .5 Ω | 8 Ω | .1 Ω |
| Coff | .2 pF | 1.6 pF | 800 pF | 2 pF | 1 pF |
| Vstandoff | ◆◆◆ | ◆◆◆ | ◆◆◆ | ◆◇◇ / ◆◆◇ | ◆◆◆ |
| Ileakage | ◆◆◆ | ◆◆◆ | ◆◆◆ | ◆◇◇ | ◆◆◆ |
| Qinj | ◆◆◆ | ◆◆◆ | ◆◇◇ | ◆◇◇ | ◆◆◆ |
| Bandwidth | ◆◆◆ | ◆◆◆ | ◆◆◇ | ◆◆◇ | ◆◆◇ |
| RF Isolation | ◆◆◆ | ◆◆◆ | ◆◆◆ | ◆◆◇ | ◆◆◆ |
| Switching Time | ◆◆◆ | ◆◆◆ | ◆◇◇ | ◆◆◆ | ◆◆◇ |